Deceleration lens

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Svetlana B. Radovanov (54 patents)
• Jason M. Schaller (57 patents)
• Richard M. White (41 patents)
• Kevin Verrier (4 patents)
• James W. Blanchette (2 patents)
• Bon-Woong Koo (78 patents)
• Eric D. Hermanson (38 patents)
• Kevin M. Daniels (25 patents)

View full patent text on Google Patents →