Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test object

Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test object

US Patent 8472013 · Granted Jun 25, 2013

Estimated economic value: $51,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical apparatus, evaluation apparatus, evaluation method, and manufacturing me2025
Wavefront aberration measuring method, wavefront aberration measuring apparatus 2017
Transmitted wavefront measuring method, refractive-index distribution measuring 2014
Refractive index distribution measuring method and refractive index distribution2013
Talbot interferometer, its adjustment method, and measurement method2013
Refractive index distribution measuring method and apparatus using position meas2013
Refractive index distribution measuring method and apparatus, and method of prod2013
Wavefront aberration measuring method, mask, wavefront aberration measuring devi2011
Measuring apparatus, exposure apparatus and method, and device manufacturing met2011
Measurement apparatus, exposure apparatus having the same, and device manufactur2011
Measurement apparatus, exposure apparatus, and device fabrication method2010
Method and apparatus for analyzing interference fringe2009