Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof

Method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof

US Patent 8421170 · Granted Apr 16, 2013

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fiber optic MEMS microphone2024
Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers2010
Method and system for operating capacitive membrane ultrasonic transducers2007