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Systems, methods and solutions for chemical polishing of GaAs wafers
Systems, methods and solutions for chemical polishing of GaAs wafers
US Patent
8318042
· Granted Nov 27, 2012
Estimated economic value:
$1,163,000
ⓘ
Assignee
Axt
Inventors
Tan Kaixie
(1 patents)
Gu Yan
(1 patents)
Wang Yuanli
(1 patents)
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