Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of optical proximity correction

Methods of optical proximity correction

US Patent 8316327 · Granted Nov 20, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Buried power rails integrated with decoupling capacitance2025
Semiconductor structure and method for forming a semiconductor structure2025
Methods for forming contacts in semiconductor devices2013
Semiconductor devices and methods of manufacturing thereof2012
Integrated circuits and methods of design and manufacture thereof2011
Adjustment of mask shapes for improving printability of dense integrated circuit2011
Methods of optical proximity correction2011
Semiconductor devices and methods of manufacturing thereof2011
Lithography masks and methods2010
Gridded contacts in semiconductor devices2010
Feature patterning methods2010
Methods of forming an interconnect structure2009