Interpenetrating polymer network structure and polishing pad, and process for producing the same

Assignee

• Toray Industries

Inventors

• Norikazu Tabata (13 patents)
• Kazuhiko Hashisaka (2 patents)
• Masahiro Sugimura (16 patents)
• Takuo Sakamoto (1 patents)
• Masaki Ue (1 patents)
• Hiroyuki Nakayama (172 patents)
• Seiji Fukuda (13 patents)

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