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Home › Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants

Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants

US Patent 8293001 · Granted Oct 23, 2012

Estimated economic value: $17,596,000 ⓘ

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