Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Position detector and exposure apparatus

Position detector and exposure apparatus

US Patent 8278616 · Granted Oct 2, 2012

Estimated economic value: $96,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Planar motor and stage using the same2011
Planar pulse motor, exposure apparatus, and device manufacturing method2010
Exposure apparatus2009
Exposure apparatus2007
Information storage output system and information storage output service2007
Exposure apparatus2006
Exposure apparatus2006
Exposure apparatus2006
Exposure apparatus and exposure method2005
Light source, light source generation control method, exposure apparatus and mai2005
Exposure apparatus and method, device manufacturing method, and discharge lamp2004
Exposure apparatus and method, device manufacturing method, and discharge lamp2002