Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for etching and filling deep trenches

Method for etching and filling deep trenches

US Patent 8273664 · Granted Sep 25, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Super junction structure and method for manufacturing the same2025
Circuit structure and related method to compensate for sense amplifier leakage2025
Super junction device and method for making the same2024
Interaction method and interaction device for search result2021
Searching method and apparatus2019
Method and apparatus for presenting search result2018
Semiconductor device and method for fabricating the same2015
Super-junction device and method of forming the same2015
Superjunction structure, superjunction MOS transistor and manufacturing method t2014
Semiconductor structures and fabrication methods including trench filling2014
Method for manufacturing trench type superjunction device and trench type superj2014
Superjunction device and method for manufacturing the same2014