Vacuum pump unit

Assignee

• Ebara

Inventors

• Takashi Hozumi (14 patents)
• Nobuhito Miyashita (2 patents)
• Takanori Inada (13 patents)
• Kozo Matake (14 patents)
• Yoshinori Ojima (16 patents)
• Susumu Miyake (4 patents)
• Katsuaki Usui (14 patents)

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