Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component

Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component

US Patent 8232126 · Granted Jul 31, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for producing a nanoscale channel structure2025
Spectrometer device and method for producing a spectrometer device2024
Interferometer element, spectrometer and method for operating an interferometer2023
Readout signal generator and method for operating a capacitive device2023
Micromechanical mirror device, mirror system, and method for producing a microme2023
Spectrometer device and method for producing a spectrometer device2023
Micromechanical sensor device with improved liquid tightness protection2022
Interferometer and method for producing an interferometer2022
MEMS optical switch with stop control2022
In-plane MEMS optical switch2022
MEMS optical switch with a cantilever coupler2022
MEMS component having low-resistance wiring and method for manufacturing it2021