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Home › Grating with a large aspect ratio, in particular to be used as an X-ray optical grating in a CT system, produced by a lithography method

Grating with a large aspect ratio, in particular to be used as an X-ray optical grating in a CT system, produced by a lithography method

US Patent 8223924 · Granted Jul 17, 2012

Estimated economic value: $545,000 ⓘ

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