Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hybrid diffraction modeling of diffracting structures

Hybrid diffraction modeling of diffracting structures

US Patent 8195435 · Granted Jun 5, 2012

Estimated economic value: $10,151,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Computation efficiency by diffraction order truncation2017
Numerical aperture integration for optical critical dimension (OCD) metrology2014
Training a machine learning system to determine photoresist parameters2011
Determining photoresist parameters using optical metrology2010
Apparatus for deriving an iso-dense bias2009
Approximating eigensolutions for use in determining the profile of a structure f2009
Optical metrology optimization for repetitive structures2009
Method of controlling a fabrication process using an iso-dense bias2009
Optical metrology of single features2009
Automated process control using optical metrology and photoresist parameters2009
Generating simulated diffraction signals for two-dimensional structures2008
Azimuthal scanning of a structure formed on a semiconductor wafer2008