Arrangement of MEMS devices having series coupled capacitors

Assignee

• Epcos Ag

Inventors

• Peter Gerard Steeneken (45 patents)
• Kevin Boyle (51 patents)
• Antonius J.M. De Graauw (2 patents)
• Theodoor Gertrudis Silvester Maria Rijks (10 patents)
• Jozef Thomas Martinus van Beek (52 patents)

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