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Home › Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained

Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained

US Patent 8193550 · Granted Jun 5, 2012

Estimated economic value: $5,227,000 ⓘ

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