Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them

Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them

US Patent 8184356 · Granted May 22, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV generator, EUV lithography apparatus including the same, and method for fabr2025
Hydrogen recirculation ejector for fuel cells2025
Display device2025
Apparatus and method for generating dancing avatar2025
Gene amplification module2025
Solar panel disassembly device and solar panel disassembly method using the same2025
Lipid nanoparticle preparation device2025
Double-sided cooling apparatus for power module2025
Solar panel cutting unit2025
Solar panel disassembling apparatus2025
Imaging lens2025
Compressor control apparatus and method2024