Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby

Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby

US Patent 8137869 · Granted Mar 20, 2012

Estimated economic value: $6,690,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Re-calibration of pre-recorded images during interventions using a needle device2018
Device for imaging the interior of an optically turbid medium and receptacle uni2016
Method and device for optical imaging of a turbid medium2016
Optical element and lithographic apparatus2015
Detection apparatus and detection method2014
System and method for detecting at least one contamination species in a lithogra2013
Device and method for acquiring image data from a turbid medium2013
Optical element, lithographic apparatus including such optical element and devic2012
Illumination system and filter system2012
System and method for detecting at least one contamination species in a lithogra2012
Method and device for removing particles generated by means of a radiation sourc2012
Spectral purity filter for multi-layer mirror, lithographic apparatus including 2012