Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma generating apparatus and plasma treatment apparatus

Plasma generating apparatus and plasma treatment apparatus

US Patent 8133348 · Granted Mar 13, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film forming apparatus2025
Substrate treatment device and substrate treatment method2022
High frequency antenna and plasma processing device2021
Shower head, processing apparatus, and shower plate2020
Substrate treatment device and substrate treatment method2020
Plasma process end point determination method and apparatus, and plasma evaluati2001
Plasma processing apparatus and a plasma processing method2000
Microwave excitation plasma processing apparatus and microwave excitation plasma1999