Mix head assembly for forming chemical mechanical polishing pads

Assignee

• Rohm And Haas Electronic Materials Cmp Holdings

Inventors

• John Esbenshade (2 patents)
• Andrew M Geiger (3 patents)
• Paul Libbers (2 patents)
• Samuel J. November (4 patents)
• Paul J. Sacchetti (4 patents)
• Jonathan Tracy (4 patents)
• David Verbaro (3 patents)
• Michael E Watkins (2 patents)

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