Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS filter with voltage tunable center frequency and bandwidth

MEMS filter with voltage tunable center frequency and bandwidth

US Patent 8111114 · Granted Feb 7, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

In-plane and out-of-plane disk resonator2023
MEMS rotation rate sensor2023
In-plane and out-of-plane disk resonator2022
Low power asynchronous GPS baseband processor2020
Dual mode gyroscope2019
Low power asynchronous GPS baseband processor2018
Micromachined cross-hatch vibratory gyroscopes2018
Method of fabricating piezoelectric MEMS devices2018
Gyroscopes based on optomechanical sensing2016
Optomechanical sensors based on coupling between two optical cavities2015
Silicon acousto-optic modulator structure and method2015
Method of actuating an internally transduced pn-diode-based ultra high frequency2015