Compositions and methods for modifying a surface suited for semiconductor fabrication

Assignee

• 3M

Inventors

• L. Charles Hardy (10 patents)
• Heather K. Kranz (9 patents)
• Thomas E. Wood (94 patents)
• David A. Kaisaki (10 patents)
• John J. Gagliardi (41 patents)
• John C. Clark (50 patents)
• Patricia M. Savu (77 patents)
• Philip G. Clark (9 patents)

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