Method for gettering oxygen and water during vacuum deposition of sulfide films

Assignee

• Ifire Ip

Inventors

• Dan Cheong (8 patents)
• Paul Barry Del Bel Belluz (2 patents)
• Stephen C. Cool (6 patents)
• Abdul Nakua (5 patents)
• James Alexander Robert Stiles (26 patents)
• Yong Seon Lee (2 patents)
• Terry Hunt (4 patents)
• Vincent Joseph Alfred Pugliese (9 patents)

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