Photomask blank and photomask

Assignee

• Shin-Etsu Chemical Co.
• Toppan Printing Co.

Inventors

• Hiroki Yoshikawa (113 patents)
• Yukio Inazuki (100 patents)
• Satoshi Okazaki (54 patents)
• Takashi Haraguchi (32 patents)
• Tadashi Saga (14 patents)
• Yosuke Kojima (13 patents)
• Kazuaki Chiba (6 patents)
• Yuichi Fukushima (21 patents)

View full patent text on Google Patents →