Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for scrubbing CMP slurry systems

System and method for scrubbing CMP slurry systems

US Patent 8012266 · Granted Sep 6, 2011

Estimated economic value: $12,314,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Purchaser centered, product driven world wide web searching and e-commerce syste2017
Purchaser centered, product driven world wide web searching and e-commerce syste2012
Ultrasonic conditioning device cleaner for chemical mechanical polishing systems2005
Ultrasonic conditioning device cleaner for chemical mechanical polishing systems2005
High efficiency metal lift-off process1987