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Home › Debris minimization and improved spatial resolution in pulsed laser ablation of materials

Debris minimization and improved spatial resolution in pulsed laser ablation of materials

US Patent 7994450 · Granted Aug 9, 2011

Estimated economic value: $2,733,000 ⓘ

Assignee

IBM

Inventors

Richard A. Haight (75 patents)
Peter Longo (20 patents)
Alfred Wagner (63 patents)

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