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Home › Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate

Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate

US Patent 7973345 · Granted Jul 5, 2011

Estimated economic value: $5,297,000 ⓘ

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