Neutralization apparatus having minute electrode ion generation element

Assignee

• Fisa
• National Institute Of Advanced Industrial Science And Technology

Inventors

• Takafumi Seto (8 patents)
• Makoto Hirasawa (7 patents)
• Masaaki Tsuji (26 patents)
• Akira Okuyama (5 patents)
• Susumu Saito (201 patents)

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