Semiconductor device with a barrier film

Assignee

• Semiconductor Technology Academic Research Center

Inventors

• Junichi Koike (61 patents)
• Makoto Wada (92 patents)
• Shingo Takahashi (59 patents)
• Noriyoshi Shimizu (112 patents)
• Hideki Shibata (74 patents)
• Satoshi Nishikawa (210 patents)
• Takamasa Usui (75 patents)
• Hayato Nasu (10 patents)
• Masaki Yoshimaru (25 patents)

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