Vibration sensor and method for manufacturing the vibration sensor

Assignee

• Omron

Inventors

• Takashi Kasai (53 patents)
• Yasuhiro Horimoto (9 patents)
• Fumihito Kato (6 patents)
• Masaki Munechika (3 patents)
• Shuichi Wakabayashi (28 patents)
• Toshiyuki Takahashi (85 patents)
• Masayuki Inuga (1 patents)

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