Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports

Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports

US Patent 7924119 · Granted Apr 12, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods having multi-axis sensitivity and translational mode shapes2025
Acoustically decoupled MEMS devices2025
Acoustoelectric amplification in resonant piezoelectric-semiconductor cavities2025
Acoustoelectric amplification in resonant piezoelectric-semiconductor cavities2023
System and method for radio frequency power sensing and scavenging based on phon2023
Acoustically decoupled MEMS devices2023
Accelerometer contact microphones and methods thereof2023
Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope2023
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted qu2023
Distributed-mode beam and frame resonators for high frequency timing circuits2022
Sensing thermal gradients within a microelectromechanical device2022
MEMS inertial measurement apparatus having slanted electrodes for quadrature tun2022