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Home › MEMS relay with a flux path that is decoupled from an electrical path through the switch and a suspension structure that is independent of the core structure and a method of forming the same

MEMS relay with a flux path that is decoupled from an electrical path through the switch and a suspension structure that is independent of the core structure and a method of forming the same

US Patent 7902946 · Granted Mar 8, 2011

Estimated economic value: $2,819,000 ⓘ

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