Biolithographical deposition and materials and devices formed therefrom

Assignee

• University Of Maryland, College Park
• University Of Maryland, Baltimore

Inventors

• Gregory F. Payne (12 patents)
• Gary W. Rubloff (26 patents)
• Hyunmin Yi (7 patents)
• Rohan Fernandes (7 patents)
• Li-Qun Wu (4 patents)
• Reza Ghodssi (10 patents)
• William E. Bentley (14 patents)

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