Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vortex chamber lids for atomic layer deposition

Vortex chamber lids for atomic layer deposition

US Patent 7780789 · Granted Aug 24, 2010

Estimated economic value: $4,612,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shadow ring lift to improve wafer edge performance2025
Gas distribution plate2025
Gas distribution plate2025
Methods and apparatus for cleaning a vessel2025
Apparatus for providing a gas mixture to a reaction chamber and method of using 2025
Methods of operating a spatial deposition tool2025
Process chamber shower head2025
Methods for detection using optical emission spectroscopy2025
Weighted lift pin2025
Plasma showerhead assembly and method of reducing defects2025
Self field-suppression CVD tungsten (W) fill on PVD W liner2025
Thermal processing susceptor2025