Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device formed inside hermetic chamber having getter film

MEMS device formed inside hermetic chamber having getter film

US Patent 7696622 · Granted Apr 13, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Radiation detector, radiation CT apparatus, and method of manufacturing radiatio2025
Antenna device, antenna module, communication device, and radar device2024
Overvoltage protection circuit2024
Impeller, fan, and air-conditioning apparatus2024
Axial flow fan, air-sending device, and refrigeration cycle apparatus2024
Outdoor unit for air-conditioning apparatus2024
Urea removing apparatus2023
Propeller fan, air-sending device, and refrigeration cycle device2023
Seal structure for gas turbine rotor blade2023
Propeller fan, outdoor unit, and refrigeration cycle apparatus2023
Substrate liquid processing apparatus2023
Electric blower, electric vacuum cleaner, and hand drier2023