Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gallium oxide-zinc oxide sputtering target, method of forming transparent conductive film, and transparent conductive film

Gallium oxide-zinc oxide sputtering target, method of forming transparent conductive film, and transparent conductive film

US Patent 7686985 · Granted Mar 30, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

IGZO sputtering target2023
Oxide sintered compact, its production method, and raw material powder for produ2017
Sputtering target assembly2015
Sintered oxide compact target for sputtering and process for producing the same2015
Sintered compact, amorphous film and crystalline film of composite oxide, and pr2014
Sintered compact of composite oxide, amorphous film of composite oxide, process 2012
Amorphous film of composite oxide, crystalline film of composite oxide, method o2012
Gallium oxide-zinc oxide sputtering target, method for forming transparent condu2010
Gallium oxide/zinc oxide sputtering target, method of forming transparent conduc2010