Spacer forming method and spacer forming apparatus

Assignee

• Ulvac

Inventors

• Yasuzo Tanaka (17 patents)
• Masao Murata (9 patents)
• Junpei Yuyama (15 patents)
• Hiroshi Koshina (2 patents)
• Hiroto Uchida (26 patents)
• Koji Hane (4 patents)
• Takanori Tsuji (7 patents)
• Mitsuru Yahagi (9 patents)

View full patent text on Google Patents →