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Home › Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects

Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects

US Patent 7671431 · Granted Mar 2, 2010

Estimated economic value: $18,119,000 ⓘ

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