Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods for etching layers within a MEMS device to achieve a tapered edge

Methods for etching layers within a MEMS device to achieve a tapered edge

US Patent 7660058 · Granted Feb 9, 2010

Estimated economic value: $25,999,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reconfigurable antenna2025
Projector2025
Method for fabricating MEMS-based cooling systems2025
Organic light-emitting diode display with patterned anodes and optical cavities2025
Method and system for fabricating a piezoelectric device2024
Organic light-emitting diode display with patterned anodes and optical cavities2023
Adjustable container carrying strap structure2020
Interconnects containing serpentine line structures for three-dimensional memory2020
Encapsulated spacers for electromechanical systems display apparatus2018
Self-aligned isolation dielectric structures for a three-dimensional memory devi2018
System for display images2017
Angled facets for display devices2017