Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device and interposer and method for integrating MEMS device and interposer

MEMS device and interposer and method for integrating MEMS device and interposer

US Patent 7655538 · Granted Feb 2, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Silicon MEMS gyroscopes with upper and lower sense plates2024
Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plate2022
Miniature electric field detector2022
Miniature electric field detector2020
Apparatus and method for forming alignment features for back side processing of 2015
MEMS sensors with closed nodal anchors for operation in an in-plane contour mode2015
MEMS device and interposer and method for integrating MEMS device and interposer2014
Resonating sensor with mechanical constraints2014
MEMS stiction testing apparatus and method2012
Method for integrating MEMS device and interposer2008
Method for microfabricating structures using silicon-on-insulator material2008
Method for fabricating a tuning fork gyroscope2007