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Home › MEMS device with integrated optical element

MEMS device with integrated optical element

US Patent 7652814 · Granted Jan 26, 2010

Estimated economic value: $30,766,000 ⓘ

Assignee

Qualcomm

Inventors

Fan Zhong (39 patents)
Chun-Ming Wang (50 patents)
Stephen Zee (12 patents)

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