Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method

Assignee

• Shimadzu
• Mitsubishi Electric

Inventors

• Naoki Yoshioka (22 patents)
• Tatsushi Kawamoto (7 patents)
• Mitsushi Kawao (4 patents)
• Shigeru Matsuno (30 patents)
• Akira Yamada (290 patents)
• Shoji Miyashita (10 patents)
• Fusaoki Uchikawa (41 patents)

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