Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus, and device manufacturing method

Lithographic apparatus, and device manufacturing method

US Patent 7629594 · Granted Dec 8, 2009

Estimated economic value: $2,279,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Low-density electrical traces on a transparent or reflective substrate2025
Substrate support, lithographic apparatus, method for manipulating charge distri2025
Lithographic apparatus and electrostatic clamp designs2024
Lithographic apparatus2024
Lithographic apparatus2024
Multi-color phosphor converted LED package with single cavity2024
Integrated optical system for dynamic diffuse and directional lighting2024
Tunable lighting system with preferred color rendering2024
Prolonging optical element lifetime in an EUV lithography system2023
Color tunable light emitting diode (LED) systems, LED lighting systems, and meth2023