Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for enhanced critical dimension scatterometry

Apparatus and method for enhanced critical dimension scatterometry

US Patent 7615752 · Granted Nov 10, 2009

Estimated economic value: $4,055,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for remote storage device scanning for detecting restricted co2024
Method for evaluating microstructures on a workpiece based on the orientation of2011
Method for evaluating microstructures on a workpiece based on the orientation of2010
Scatterometer having a computer system that reads data from selected pixels of t2009
Scatterometer having a computer system that reads data from selected pixels of t2009
Apparatus and method for enhanced critical dimension scatterometry2009
Apparatus and method for enhanced critical dimension scatterometry2009
Self-sealing door water shield barrier2004
Support attachment and cigarette lighter safety device2000