Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for controlling wafer temperature

System and method for controlling wafer temperature

US Patent 7612890 · Granted Nov 3, 2009

Estimated economic value: $28,979,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser ultrasonic measurement system with movable beam delivery2012
Accurate image acquisition for structured-light system for optical shape and pos2012
Adjustable interferometer for laser ultrasonic measurement2012
Mid-IR laser for generation of ultrasound using a CO2 laser and harmonic generat2012
Mid-IR laser for generation of ultrasound2011
Method and apparatus for spectroscopic characterization of samples using a laser2011
Non-destructive inspection using laser-ultrasound and infrared thermography2011
Block-terminated fiber for laser generation of ultrasonic waves2011
Pre-amplifier for detection lasers within laser ultrasonic inspection systems2011
Method and apparatus for generating mid-IR laser beam for ultrasound inspection2010
Fiber-based mid-infrared generation laser for laser ultrasound inspection2010
System and method to enable eye-safe laser ultrasound detection2010