Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

US Patent 7612321 · Granted Nov 3, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical coupling apparatus for a dual column charged particle beam tool for imag2012
Apparatus and method for optical interference fringe based integrated circuit pr2011
Apparatus and method for optical interference fringe based integrated circuit pr2010
Apparatus and method of forming silicide in a localized manner2008
Integration of photon emission microscope and focused ion beam2007
Imaging integrated circuits with focused ion beam2006
Method for determining thickness of a semiconductor substrate at the floor of a 2005
Method and apparatus for global die thinning and polishing of flip-chip packaged2005
Measuring back-side voltage of an integrated circuit2005
Method for global die thinning and polishing of flip-chip packaged integrated ci2004
Differential pulsed laser beam probing of integrated circuits2001