Materials purification by treatment with hydrogen-based plasma

Assignee

• Max-Planck-Gesellschaft Zur Föderung Der Wissenschaften E.V.

Inventors

• Anastasia Alekseeva (1 patents)
• Kirill Kovnir (4 patents)
• Pavel Chizhov (1 patents)
• Michael Baitinger (1 patents)
• Yuri Grin (1 patents)

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