Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Microelectromechanical systems encapsulation process with anti-stiction coating

Microelectromechanical systems encapsulation process with anti-stiction coating

US Patent 7582514 · Granted Sep 1, 2009

Estimated economic value: $3,172,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Centrifuge unit for a microfluidic device for processing liquid samples2025
Sensor device for magnetic field measurement by means of optical magnetic resona2025
Method and device for determining the vital functions of a vehicle occupant2025
Method for producing a sequencing unit for sequencing a biochemical material and2025
Magnetic field sensor and method for measuring a magnetic field2024
Process for producing a base of an analysis cell for analyzing a biochemical mat2024
Method for measuring phase currents of a device under test, in particular of an 2024
Transistor comprising a ceramic and an ionogel2024
Method for determining a change in a rotational orientation in the space of an N2024
Microfluidic device and method for the nanostructure sequencing of nucleotide st2024
Mold detecting device using electromagnetic waves2024
Device for detecting mold2023