Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Boron doped shell for MEMS device

Boron doped shell for MEMS device

US Patent 7563720 · Granted Jul 21, 2009

Estimated economic value: $18,627,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) d2012
Optical component design for silicon optical bench2012
System and method for free space micro machined optical bench2012
Interferometric fiber optic gyroscope with silicon optical bench front-end2012
Systems and methods for micromachined cylindrical lenses2010
System and method for fiber based resonator coupling2010
Optical micro-spectrometer2009
Integrated three-dimensional magnetic sensing device and method to fabricate an 2008
Integrated three-dimensional magnetic sensing device and method to fabricate an 2006
MEMS frequency standard for devices such as atomic clock2005
Vertically integrated magnetic memory2001
Integrated heterostructure acoustic charge transport (HACT) and heterostructure 1994