Actuator for micro-electromechanical system fabry-perot filter

Assignee

• GE

Inventors

• Anis Zribi (39 patents)
• Glenn Scott Claydon (42 patents)
• David Cecil Hays (10 patents)
• Stacey Joy Kennerly (21 patents)
• Long Que (18 patents)
• Shankar Chandrasekaran (30 patents)
• Shivappa Goravar (13 patents)
• Ayan Banerjec (1 patents)

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