{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Electron beam apparatus, and method for manufacturing a spacer used for the same", "item": "https://www.patentleaderboard.com/patent/7537503"}]}

Home › Electron beam apparatus, and method for manufacturing a spacer used for the same

Electron beam apparatus, and method for manufacturing a spacer used for the same

US Patent 7537503 · Granted May 26, 2009

Estimated economic value: $284,000 ⓘ

Assignee

Canon

Inventors

Taro Hiroike (19 patents)
Koji Yamazaki (90 patents)
Yoichi Ando (53 patents)

View full patent text on Google Patents →